@software{voltpeer_science_sputter_rate_depth_2026,
  author = {VoltPeer maintainers},
  title = {可变溅射速率与深度标定},
  year = {2026},
  url = {https://dazi.gsarrizabalaga.xyz/resource-science\_sputter\_rate\_depth.html},
  version = {1.0.0},
  note = {VoltPeer. 可变溅射速率与深度标定. Synthetic teaching delivery, version 1.0.0; data generator 1.0.0.}
}