TY  - COMP
AU  - VoltPeer maintainers
TI  - 可变溅射速率与深度标定
PY  - 2026
UR  - https://dazi.gsarrizabalaga.xyz/resource-science_sputter_rate_depth.html
N1  - VoltPeer. 可变溅射速率与深度标定. Synthetic teaching delivery, version 1.0.0; data generator 1.0.0.
ER  -